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関連資料一覧:(本学所蔵)
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件名:LCSH:Lithography
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1書影Advanced lithography. pbk ( IOP short meetings series ; no. 10. )中央図書館 IOP Publishing1988中央5階洋 549.7||A 16
2書影Advanced MOS device physics ( VLSI electronics : microstructure science ; v. 18 )中央図書館edited by Norman G. Einspruch, Gennady Sh. GildenblatAcademic Press1989中央5階洋 549.8||A 16
3書影Electron-beam technology in microelectronic fabrication 中央図書館edited by George R. Brewer, contributors, J. P. Ballantyne ... [et al.]Academic Press1980中央5階洋 549.9||E 45
4書影Lithographic processing of polymer using soft vacuum electron beams 中央図書館submitted by Lumin Li. 1991中央5階洋 578.44||L 61
5書影Lithography for VLSI ( VLSI electronics : microstructure science ; v. 16 )中央図書館edited by Norman G. Einspruch, R.K. WattsAcademic Press1987中央5階洋 549.7||L 71
6書影The physics of submicron lithography ( Microdevices )中央図書館Kamil A. Valiev.Plenum Press1992中央5階洋 549.9||V 23
7書影Resists in microlithography and printing ( Materials science monographs ; 76 )中央図書館Bohumil Bednář, Jaroslav Králíček, and Jaromír Zachoval, with contributions by Andrey V. Yelcov and Tatyana A. Yurre.Elsevier1993中央5階洋 549.8||B 32
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