検索条件入力 ＞ 検索結果一覧：（本学所蔵） ＞ Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California
書誌情報:Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California
Leonard J. Brillson, Fred H. Pollak, chairs/editors
sponsored by SPIE--the International Society for Optical Engineering
cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University ... [et al.]
Bellingham, Wash. : SPIE , c1990
vi, 201 p. : ill. ; 28 cm
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書誌詳細
刊年1990
形態vi, 201 p. : ill. ; 28 cm
シリーズ名Proceedings ; v. 1186
注記Includes bibliographical references and index
出版国アメリカ合衆国
標題言語英語
本文言語英語
著者情報Brillson, L. J.
Pollak, Fred H.
Society of Photo-optical Instrumentation Engineers
North Carolina State University. Center for Advanced Electronic Materials Processing
ISBN0819402222
NCIDBA24466479

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